Ukuhlolwa koburhabaxa bomphezulu, ukuphakama kwenyathelo kunye nobukhulu befilimu ebhityileyo kwii-wafers ze-semiconductor, iilensi ze-optical ezichanekileyo kunye nezinto ezigqunyiweyo kumisela ngokuthe ngqo isivuno semveliso. Ukuskena kwe-contact probe yendabuko kukrwela ngokulula iisampuli ezibuthathaka, ngelixa izixhobo zokulinganisa ze-optical eziqhelekileyo zingenako ukunika ukuchaneka kwinqanaba le-nano. Ungalufikelela njani uvavanyo olungonakalisiyo, ukuchaneka kwe-nano ephezulu kakhulu kunye nokuhlolwa kwemveliso yobuninzi obuphezulu ngaxeshanye?
I-interferometer entsha ye-Wavelength OE yokukhanya okumhlophe kwemizi-mveliso ineendlela zokulinganisa i-interferometry ezimbini. Ngokuchongwa okungekuko ukunxibelelana, igubungela umsebenzi opheleleyo ukusuka kwi-R&D yelebhu ukuya kwi-QC yemveliso ekwi-intanethi.
IiModeli zeDual Core Interferometry kuzo zonke iindawo eziphezulu
Ngokungafaniyo nezixhobo zokulinganisa zendlela enye, le nkqubo idibanisa ii-algorithms ze-VSI (Vertical Scanning Interferometry) kunye ne-PSI (Phase-Shifting Interferometry), yanelisa iimfuno ezimbini zokulinganisa eziphambili ngomatshini omnye.
| Into yokuthelekisa | I-VSI / i-CSI | I-PSI |
|---|---|---|
| Iindawo eziphambili ezisebenzayo | Imiphezulu erhabaxa, amanyathelo, iindawo ezingaqhubekiyo nezintsonkothileyo | Imiphezulu egudileyo kakhulu, eqhubekekayo nekwisibuko |
| Uluhlu Lokulinganisa Ubude Obuthe Tye | Uluhlu olubanzi; iyakwazi ukulinganisa imingxunya enzulu kunye nezinyuko eziphakamileyo | Uluhlu olumxinwa; alufanelekanga kwizinyuko ezinkulu ezizimeleyo |
| Isisombululo esithe nkqo | Inqanaba le-nanometer; i-sub-nanometer inokufezekiswa nge-algorithms ezilungiselelweyo | Isisombululo esiphezulu; ukuphindaphindwa ukuya kwinqanaba le-sub-nanometer even sub-angstrom |
| Ukunyamezela Uburhabaxa Bomphezulu | Phezulu | Iphantsi |
| Ukungacaci kweSigaba | Phantse akukho nanye; imveliso yexabiso elipheleleyo lokuphakama iyafumaneka | Ixhomekeke kwimpazamo yokusonga isigaba se-2π |
| Isantya sokulinganisa | Ifuna ukuskena kwe-axial, kancinci kancinci | Ngokubanzi ngokukhawuleza |
| Ukumelana nokungcangcazela | Iyachaphazeleka kukungcangcazela ngexesha lokuskena | Ukutshintsha kwesigaba esineefreyimu ezininzi, okunovelwano ngakumbi kukungcangcazela |
| Izicelo eziqhelekileyo | Uburhabaxa, ukuphakama kwenyathelo, izakhiwo ezincinci, iindawo ezilungisiweyo | Uvavanyo loburhabaxa bomphezulu obugudileyo kakhulu, imbonakalo yomphezulu kunye nokuthamba kwawo |
I-PSI (Phase-Shifting Interferometry): Ikhethekileyo kwiimpawu zokuphakama ezincinci zesikali esincinci kunye neefilimu ezincinci kakhulu, ezibonelela ngesisombululo esiphezulu se-microscopic.
Isibuko sePlane
Isibuko Esigobileyo (Isibuko Esicacileyo)
Isampulu yePatheni yeFotolithografi
I-VSI Vertical Scanning Interferometry: Yenzelwe izinto zokusebenza ezinobude obukhulu kunye namanyathelo amade; uluhlu olupheleleyo lokulinganisa luyafumaneka ngaphandle kokuskena okuhlukeneyo.
Uluhlu olujikelezayo lwe-micro bump kwii-wafers ezipakishwe kakuhle
I-Elliptical micro bump array kwii-wafers ezipakishwe kakuhle
uluhlu lwe-microlens
Ihambelana nomthombo wokukhanya omhlophe omfutshane we-450–700 nm, inokuthintela ngempumelelo ukukhanya okulahlekileyo okuvela kwiimbonakalo ezininzi kwaye inika ukusebenza okuqinileyo kokuchasana nokuphazamiseka. Ixhotyiswe ngeengubo ezininzi, le nxalenye ye-optical enokukhanya okuphantsi inokukhupha imiqondiso yokuphazamiseka ezinzileyo necacileyo, ivelise iziphumo zokulinganisa ezichanekileyo nezithembekileyo.
2. Iinkcukacha zeNano-Grade eziPhambili kwiShishini, Idatha elandelekayo nezinzileyo yexesha elide
-Le nkqubo isebenzisa umthombo wokukhanya omhlophe we-LED onobude obuphakathi obuyi-550 nm, oxhotyiswe ngeeparamitha zokusebenza eziphambili ezihambelana nemigangatho yeprimiyamu yehlabathi.
-Isisombululo esithe nkqo: <1 nm, impazamo yokulinganisa ephindaphindiweyo: <10 nm, ukuchaneka kwe-nanometer yokwenyani
-Uluhlu lokulinganisa oluphezulu oluthe nkqo: 500 μm, akukho mfuneko yokutshintsha indawo ngokuphindaphindiweyo kwizakhiwo ezincinci eziphezulu.
-Isantya sokuskena: 100 μm/s, ukuskena okupheleleyo kugqitywe kwimizuzwana eli-10, ukulinganisela ukuchaneka kunye nokufikelela kovavanyo.
-Ihambelana nemigangatho elandelekayo ye-NIST, i-algorithm eyakhelwe ngaphakathi yokulinganisa ngokuzenzekelayo iqinisekisa idatha yebhetshi elandelekayo ehambelanayo, ihlangabezana nemigangatho engqongqo ye-QC kwimizi-mveliso ye-semiconductor kunye ne-optical.
| Into | Ipharamitha |
| Ukulinganisa Amandla | I-topography yomphezulu we-3D, uburhabaxa bomphezulu, ukuphakama kwenyathelo kunye nobukhulu befilimu yezinto ezibonisa ukukhanya kunye nezinto ezibonakalayo |
| Imo Yokufumana Idatha | I-Vertical Scanning Interferometry (VSI) + I-Phase-Shifting Interferometry (PSI) |
| Inkqubo yoLungiso | I-NIST esemgangathweni elandelekayo + i-algorithm yokulinganisa ngokuzenzekelayo |
| Uluhlu Lokulinganisa Oluthe Tye | 500 μm |
| Intsimi yoMbono | 20× injongo: 0.87 × 0.65 mm |
| Ukusebenza kweKhamera | Isisombululo esiphezulu: 2048×2448; Ireyithi yesakhelo: 74 Fps; Ubunzulu beBit: 12 bit |
| Isantya sokuSkena | 100 μm/s (Imo yokuchaneka) |
| Iinketho zeLensi zeNjongo | Iinjongo zokukhulisa ezingama-20x / 50x ezinokucwangciswa |
| Uyilo loFakelo | Iqonga lokuzahlula elisebenzayo lokungcangcazela elakhelwe ngaphakathi, ukufakwa ngokuthe tye nangokuthe nkqo kuyafumaneka |
| Ubukhulu obupheleleyo (L×W×H) | 120 × 80 × 65 cm |
| Ukusinda okushiyekile | ≤58 kg |
3. Uyilo lweKhabhinethi oluDibeneyo lweMizi-mveliso, oluhambelana neLebhu kunye noMgca weMveliso
Yenzelwe zombini iiworkshops zokuvelisa ngobuninzi kunye neelabhoratri zophando lwesayensi ezinokuhambelana nokufakelwa okuguquguqukayo.
Iqonga lokwahlulahlula ukungcangcazela elisebenzayo elakhelwe ngaphakathi: Umlinganiselo ozinzileyo phantsi kokungcangcazela kwefektri, akukho tafile yokwahlulahlula ukungcangcazela eyongezelelweyo efunekayo.
Ulwakhiwo lokufakelwa kabini: Ukuseta ngokuthe tye okanye ngokuthe nkqo, ukuhlanganiswa okulula kunye nemigca yemveliso ezenzekelayo kunye neendawo zokusebenza zelebhu.
Umzimba oqinileyo oquka konke: Umlinganiselo omncinci wesakhiwo onobukhulu obuyi-120×80×65 cm, ubunzima obuyi-≤58 kg, kulula ukuwusebenzisa kwindawo leyo.
Inkqubo epheleleyo idibanisa umthombo wokukhanya, iyunithi ephambili ye-interferometer kunye nemodyuli yolawulo. Iplagi kunye nokudlala emva kokukhupha, akukho mfuneko yokulungiswa kwendlela ye-optical enzima.
Ukhuseleko olubanzi lwezicelo zokwenziwa kwemveliso echanekileyo
Ishishini leSemiconductor: Ukuhlolwa kwe-3D topography kunye nokuphakama kwenyathelo kwee-silicon wafers kunye nee-micro-nano chips.
I-Precision Optics: Uvavanyo lobunzima kunye nobukhulu befilimu kwiilensi ze-optical, iinjongo kunye nezinto ze-optical ezigqunywe nge-coated.
Iingubo Ezintsha Ezisebenzayo: Uhlalutyo lweprofayili yomphezulu kunye nobukhulu beengubo ezikhanyayo kunye neefilimu ezincinci ezisebenzayo.
IiLebhu zoPhando lwezeSayensi: Uvavanyo lokuchazwa kwesakhiwo se-micro-nano kunye novavanyo lokwakheka kwecandelo elichanekileyo.
Njengoko ineminyaka yamava obuchwephesha kwi-optical R&D, i-Wavelength OE iphuhlisa ngokuzimeleyo zonke iindlela eziphambili ze-optical kunye ne-algorithms yokulinganisa ii-interferometers zokukhanya okumhlophe. Ulawulo olupheleleyo lobuchwephesha ukusuka kwimithombo yokukhanya, iilensi ezijolise ngqo ukuya kwiinkqubo zokulinganisa. Iyunithi nganye idlula kuvavanyo oluchanekileyo olujikelezayo ngaphambi kokuba ihanjiswe. Sinikezela ngenkxaso yobugcisa epheleleyo emva kokuthengisa kwaye senze ngokwezifiso izisombululo zokulinganisa ezikhethekileyo ngokusekelwe kubungakanani bomsebenzi wabathengi kunye neemfuno zomgca wemveliso ozenzekelayo.
Ixesha leposi: Julayi-15-2026