Iilensi ze-F-Theta zihlala zisetyenziswa kunye nezipili zokuskena ze-galvanometer kwiinkqubo zokukrola, ukusika, kunye nokumakisha nge-laser. Ngokwesiqhelo ukuphambuka kwelensi ye-F-Theta kugcinwa ngaphantsi kwe-1% ukuze ikwazi ukuvelisa indawo echanekileyo kwintsimi ethe tyaba kwiplani yomfanekiso.
Ukunyamezelana kobubanzi: +0/-0.13mm
Ukunyamezela Ubukhulu: ± 0.25mm
Ukunyamezela Ubude beFocal: ±2%
Utshintsho loBungqingqwa boMda (ETV): ≤3 arc min.
Imbobo ecacileyo: >90%
Surface Flatness: λ/4 per 1″ Dia@632.8nm
Umgangatho womphezulu: 40-20 SD
Ukwaleka kwe-AR: R<0.2% ngomphezulu @10.6μ